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CMOS Transistor Layout
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Copyright © 2005
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: S, E) n5 G- k0 |0 ?. ^, zTable of Contents( G) A) G/ U. k7 O6 ]2 r% k8 V+ S
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Preface9 P7 a; p4 K$ k% a0 S
1. Introduction .................................................................. 1
& `" d V# _: j( f; R2. MOS Transistors ........................................................... 29 [: i/ |& b3 W3 p4 C9 `
3. Fabrication of MOS Transistor ..................................... 5
2 m; _ ^ B. m1 V5 s0 X( ?! j4. Layout a Single Transistor .......................................... 11
5 u8 l3 @8 `" ]# D4 ]0 X5 n. cFirst Stroke The basic transistor layout ..................... 12$ V2 J( @% ]' k1 u- u0 B9 p/ Y$ ~8 E7 x
Second Stroke Compact the transistor layout ................ 13
/ i. y. Z4 G2 `* BThird Stroke Speed up the transistor ........................... 17
% |& x, E4 D( _$ J) l3 ^6 xFourth Stroke Clean up the substrate Disturbances ...... 20$ m: A5 T" Z2 a( l. I* z( D- m1 L8 t9 Q
Fifth Stroke Balancing area, speed and noise ............ 26
0 j8 ~3 s- w8 l# F2 O& o, J) mSixth Stroke Relief the stress ...................................... 29* l9 o" r, Z3 v$ A4 `% w7 H
Seventh Stroke Protect the gate ...................................... 309 a5 y) K) p! z+ s: c0 m
Eighth Stroke Improve yield ..........................................323 _' Y+ U& N6 m$ Q
5. Layout Several Transistors ......................................... 34" d! s1 O0 P; d+ k6 m
Eighth Stroke Improve yield...........................................35# a# M3 {% s' m# k0 q; D& X# A% ]
Re-visit
* o. f8 A) Z. _, l3 ?7 U6 xNinth Stroke Close proximity .......................................36
4 R0 \; s; p% h0 a% V) U8 V7 }( ~Tenth Stroke Interdigitated layout ............................... 36
g! L1 F6 ^# DEleventh Stroke Dummy transistor ................................... 41) k0 |+ Q5 B& p* u1 m
Twelfth Stroke Two-dimension interdigitated layout ..... 43* u8 e; K% h6 H1 ]/ A
Thirteenth Stroke Guard ring for the matched transistors ... 45: i; q; U& i$ }9 I% Z* V
Fourteenth Stroke Keep NMOS away from N-well ............ 45
5 X1 @' a- h- |$ @1 G% CFifteenth Stroke Orientate the transistor ........................... 46
* ]3 Y/ @3 X" h/ Y) _7 k. p, ZSixteenth Stroke Match the interconnects ......................... 47* z+ G/ N4 T% n0 v+ ?+ h
Seventeenth Stroke The unmatchable .................................... 50
. y/ ]2 u. F: C; u8 v6. Verifying the Transistor Layout ................................. 52) ` A: p$ ^: ~$ d" a7 K+ n
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[ 本帖最後由 semico_ljj 於 2008-11-1 04:01 PM 編輯 ] |
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