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CMOS Transistor Layout
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Table of Contents
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' [5 X5 {$ @8 ?( Y% x, r+ _Preface8 o6 E1 j5 C0 y# |2 |7 q
1. Introduction .................................................................. 1
1 _- s( A5 D5 f9 q2. MOS Transistors ........................................................... 2
* L9 H: ]0 w0 I# t0 e4 p3. Fabrication of MOS Transistor ..................................... 5
5 S7 n' W. g/ h, m% H4. Layout a Single Transistor .......................................... 11
7 c* s2 R! H8 m. D9 i+ H; cFirst Stroke The basic transistor layout ..................... 12
' q2 u) _7 J( v: I0 B3 ]Second Stroke Compact the transistor layout ................ 137 n# n4 f% l7 m6 ?
Third Stroke Speed up the transistor ........................... 17
- Q( ]+ a: ^7 a/ Y6 J+ [6 H$ FFourth Stroke Clean up the substrate Disturbances ...... 202 j5 C; [8 I5 u; j! s& U, S2 d
Fifth Stroke Balancing area, speed and noise ............ 26
+ ~( [8 }9 f" KSixth Stroke Relief the stress ...................................... 29) v" q4 m; G$ W$ c
Seventh Stroke Protect the gate ...................................... 30
+ F$ q' i6 b% ]3 U1 [, p2 s uEighth Stroke Improve yield ..........................................32" R5 V- _$ R l* y6 z9 s2 l- C, L
5. Layout Several Transistors ......................................... 34
& {9 b* S( z( E1 P2 w7 ~: P( qEighth Stroke Improve yield...........................................35
$ u1 [# z' n3 Y& rRe-visit# u% `# w- W7 v" f" L, n
Ninth Stroke Close proximity .......................................36
/ p" p. \& A9 k" jTenth Stroke Interdigitated layout ............................... 36" g1 ~$ I: J+ T9 y, `
Eleventh Stroke Dummy transistor ................................... 41: J8 C" t c# u# S! L1 o; K3 `
Twelfth Stroke Two-dimension interdigitated layout ..... 43+ ?% K/ M) r1 O. x3 J5 W; f0 Z- {
Thirteenth Stroke Guard ring for the matched transistors ... 45
' q$ z* }7 M' \: A4 n* HFourteenth Stroke Keep NMOS away from N-well ............ 45
* Q5 \) M! h; h& M3 h" s# v6 t5 IFifteenth Stroke Orientate the transistor ........................... 46
2 r8 |2 j% I _0 r5 D1 R+ aSixteenth Stroke Match the interconnects ......................... 47) a6 e( W0 j: J, Q* B. z
Seventeenth Stroke The unmatchable .................................... 50
2 K$ e2 s! M( {8 m0 g6. Verifying the Transistor Layout ................................. 52
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[ 本帖最後由 semico_ljj 於 2008-11-1 04:01 PM 編輯 ] |
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