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CMOS Transistor Layout# E: S3 L/ N9 l- G
" H( @: v; r9 |8 G3 Z/ l7 t, VCopyright © 2005
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# e, ~) v# V! L0 b2 `Table of Contents& {1 k# F' J# X) Q3 U- y8 J/ w
7 i8 @) R1 r+ l: e0 FPreface4 ] Z5 M9 k1 K9 F; m
1. Introduction .................................................................. 1
. h* H) Z# {! G1 u( } b2. MOS Transistors ........................................................... 2- a$ e, q# r/ e# l! [1 b" y/ M
3. Fabrication of MOS Transistor ..................................... 5
5 v& A6 D" x% e5 T3 |4. Layout a Single Transistor .......................................... 11
* w/ {# j7 b7 }& ?* w1 {. y# eFirst Stroke The basic transistor layout ..................... 12/ Y# n% b& V' `3 j
Second Stroke Compact the transistor layout ................ 133 G' k" b9 Z) Z6 U
Third Stroke Speed up the transistor ........................... 17
3 x# q" }5 x6 y: q& W# L# O. zFourth Stroke Clean up the substrate Disturbances ...... 20
0 L) S: r9 Q* L; _1 p4 yFifth Stroke Balancing area, speed and noise ............ 26) i8 y+ O1 s3 D4 b# z
Sixth Stroke Relief the stress ...................................... 29$ e# w. p8 ~: E1 O. v
Seventh Stroke Protect the gate ...................................... 30: U. g# X0 a1 P- `/ R( f
Eighth Stroke Improve yield ..........................................32; Z& l, ^ r" u: P( M5 n
5. Layout Several Transistors ......................................... 34) o# F) a1 |& Z, I3 O0 C) y
Eighth Stroke Improve yield...........................................35/ t: E* x" v" r5 ^0 |- ~
Re-visit
0 X' ] d1 V T- Q! lNinth Stroke Close proximity .......................................36
2 t9 ^+ y: F% `, V4 JTenth Stroke Interdigitated layout ............................... 36
, B4 W% M% ]0 ?2 Z' I1 vEleventh Stroke Dummy transistor ................................... 41
$ `$ l! Z7 y. c9 pTwelfth Stroke Two-dimension interdigitated layout ..... 434 ?4 L- `9 k0 j0 o
Thirteenth Stroke Guard ring for the matched transistors ... 45
/ R1 _' K' S: D6 ^Fourteenth Stroke Keep NMOS away from N-well ............ 45( T* T- a {4 {3 Q* G# E
Fifteenth Stroke Orientate the transistor ........................... 462 J$ t ^& c) @, ~4 d. Z2 p
Sixteenth Stroke Match the interconnects ......................... 47
$ G8 D! l' N- s3 SSeventeenth Stroke The unmatchable .................................... 50! D% o9 s& m2 K; A& N2 n
6. Verifying the Transistor Layout ................................. 52
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% b6 h1 n5 E/ s[ 本帖最後由 semico_ljj 於 2008-11-1 04:01 PM 編輯 ] |
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