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CMOS Transistor Layout1 O: S6 s2 t$ F3 e
, G6 s; ^/ i9 ~4 m6 tCopyright © 2005! x- T8 ^; k7 N# M
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0 ^, g8 l! Q, ?) N) RTable of Contents/ q ]' k. a! z( z# |9 G- j: t
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Preface
. h) H3 b# Y- {: P/ v) k9 [1. Introduction .................................................................. 18 b8 e( \1 o; S8 j: p1 s* W2 p
2. MOS Transistors ........................................................... 2
/ } o; l% I1 C6 a% m2 T3. Fabrication of MOS Transistor ..................................... 5
2 M% L8 {& k/ U1 ` ?4. Layout a Single Transistor .......................................... 11
! t. B. h1 Y: p% @+ c0 U" ^First Stroke The basic transistor layout ..................... 12
3 T) S; ^6 a* w5 DSecond Stroke Compact the transistor layout ................ 13
8 u6 ?7 p; ~8 u0 }Third Stroke Speed up the transistor ........................... 17
% V/ S% g' h% b* QFourth Stroke Clean up the substrate Disturbances ...... 20
; i7 z$ [! |( a- q7 b% F. ~Fifth Stroke Balancing area, speed and noise ............ 26
% z' [' a2 ]( h9 T: Q; |% O' H9 {Sixth Stroke Relief the stress ...................................... 29
3 y* X/ O( S3 U! g. X; L+ pSeventh Stroke Protect the gate ...................................... 30" G7 ~) {4 T/ c2 ? U& q; I' j2 d
Eighth Stroke Improve yield ..........................................32
$ \+ y F' R% V. T' V5. Layout Several Transistors ......................................... 34
2 u$ J- y" k* V# u# r+ lEighth Stroke Improve yield...........................................35
, U: K0 A- E* z+ x' CRe-visit G7 R ~6 f q9 ^: M0 ?3 d7 D
Ninth Stroke Close proximity .......................................36+ d- {+ C/ E0 x4 g# f1 d1 m
Tenth Stroke Interdigitated layout ............................... 36
) G3 _" B. r0 n. ]Eleventh Stroke Dummy transistor ................................... 41
3 D# E2 D7 C l" VTwelfth Stroke Two-dimension interdigitated layout ..... 43
1 A# u0 [# h$ k1 V- rThirteenth Stroke Guard ring for the matched transistors ... 45* c4 k& R9 w- n ^! q4 Q2 p
Fourteenth Stroke Keep NMOS away from N-well ............ 45
# D3 m6 H- s" `, [) V4 F& wFifteenth Stroke Orientate the transistor ........................... 46% n' I6 Q- k# x$ m( l
Sixteenth Stroke Match the interconnects ......................... 47
1 A/ W4 |9 G; E9 H+ MSeventeenth Stroke The unmatchable .................................... 50
6 v( N6 s9 Q# j$ u( j7 o6. Verifying the Transistor Layout ................................. 52
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1 P7 v7 W% S4 }/ }: ^[ 本帖最後由 semico_ljj 於 2008-11-1 04:01 PM 編輯 ] |
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