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1 M1R1 Minimum density of MET1 area [%] =300 F5 m3 F3 G" \
-->MET1佔總面積須超過30%
- M2 _* W/ I! {, p& n" `) ]* |( g7 n7 k8 X3 y" Q* ^ p4 f7 p3 `
1 M2R1 Minimum density of MET2 area [%] =30, j9 D( Z' m3 I* H; f. u
' \$ i7 x/ M \& u-->MET2佔總面積須超過30%* N$ O, S# X: j* Y/ o% ]
( U8 Q$ T4 J( G9 H1 M3R1 Minimum density of MET3 area [%] =30
3 e* I% d% n7 l% Q! n3 H2 _, g5 C( G: g
-->MET3佔總面積須超過30%
" ^' g7 M* _0 k) F. i, r, U* P
2 ]. [( r* |% B$ J$ l1 M4R1 Minimum density of MET4 area [%] =30
# J) ], D/ d6 x
: ~' e2 Z: H) T; s-->MET4佔總面積須超過30%
! z: Z* z# K9 f+ k. ~4 L$ {* U- }. K" ~ T/ K/ x4 r! m
1 POC1 Minimum POLY1 to DIFF spacing = 0.2
& E6 r' m; l; I$ U4 q1 g, u
; O7 q1 N0 o3 \; U2 O5 U6 B" M" w--->Poly to Active的spacing須大於0.2um |
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