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ABSTRACT
- l' Q) ]6 d; R* i3 ]4 LIn this paper, we present a microfabricated fluxgate sensor for wide linear measuring range applications. The sensor consists of an electroplated copper excitation rod surrounded by an electroplated Permalloy core layer, and has planar pick-up coils for signal detection. Fabricated sensors are tested in orthogonal and parallel operation modes. The effects of operation modes and excitation conditions are compared. A linear operating range of ±900 μT is proved in the orthogonal mode, whereas the same sensor has much lower linear range in the parallel mode. The use of the sensor in a contactless current measurement application is also presented.2 g& m1 I/ C; h" h" V0 g
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