An Orthogonal Fluxgate-Type Magnetic Microsensor[EPFL]

mt7344

ABSTRACT
! i4 _  }" A9 q) JIn this paper, we present a new microfabricated
  i9 {# a' M: d9 [. B8 H% ]orthogonal fluxgate sensor structure. The sensor
consists of an electroplated copper excitation rod
surrounded by an electroplated permalloy layer and has
planar pick-up coils for signal detection. The use of
# a. Z! p% D$ K6 u3 c7 ]electroplating leads to a low-cost fabrication process
and the use of planar pick-up coils provides easy
integration with CMOS processes. The fabricated
% n8 J' W0 _' }% Esensor has an excitation independent linear range of
±100 μT, a sensitivity of 280 μV/mT, and an average
7 O* b9 F9 V: G2 [power dissipation of 0.8 mW for 30 mA-peak
sinusoidal excitation current at 100 kHz frequency.
9 R4 g/ D; t4 @
6 U; N6 b2 e! P, _" u' }! j
網路上抓的 paper, 希望對大家有幫助!!
權限10 & RDB=3
/ b& Z" c5 J" M, A+ f
3 j/ I. S' r& N& D0 e5 u/ @
* B% W! @% X3 v  m( P
: q4 {1 B6 x2 Y' P
! E* G5 ^+ {3 t6 {